The SCIF cleanroom (class 100 and class 1000) provides state-of-the-art resources for nano/micro-fabrication. Below is a list of the equipment available. Please contact us for detailed information and instrument specifications. Primary Contact: Parveen Kumar pkumar22@ucmerced.edu
Fabrication/Deposition/Etching |
Characterization |
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Cleanroom Tools |
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Mask Aligner | Profilometer | Welding Head/ wire bonder | |||
ebeam Evaporator | Atomic Force Microscope (AFM) | Solvent Rinse Station | |||
Focused Ion Beam (FIB) | Drying Oven | ||||
Sputtering | NUV Lightsource | ||||
Atomic Layer Deposition (ALD) | Particle Counter System | ||||
Electrospinning | DI Water System | ||||
Plasma System (Glow Research) | Microscope | ||||
Hot Plates | |||||
Sonicator | |||||
Spin Coater | |||||