Cleanroom

The SCIF cleanroom (Class 100 and Class 1000) provides state-of-the-art resources for nano- and micro-fabrication. A list of available equipment is provided below.

For each instrument, detailed manuals, operating instructions, safety guidelines, and relevant literature are available under the Instrument tab. Users are encouraged to review these materials carefully. While the short instructions and quick guides provide a helpful overview, consulting the full manual is strongly recommended for a deeper understanding, safe operation, and faster adaptation to the equipment.

For additional questions or specific instrument details, please contact: pkumar22@ucmerced.edu

 

Fabrication/Deposition/Etching

   

Characterization               

 

Cleanroom Tools

    Profilometer   Semi-Automatic Ball/Wedge Wire bonder
ebeam Evaporator      3D Profilometer   Welding Head/ wire bonder
Focused Ion Beam (FIB)     Atomic Force Microscope (AFM)   Drying Oven
Sputtering         NUV Lightsource
Atomic Layer Deposition (ALD)         Particle Counter System
Plasma System (Glow Research)    

 

  DI Water System
          Microscope
          Hot Plates
          Sonicator
          Spin Coater
          Solvent Rinse Station
          Platform shaker