Stylus-based system for measuring film thickness, step height, and surface roughness. Provides high-resolution surface profiles. Used for thin film and microfabrication characterization.
Model: Bruker Dektak XT
Location: SE1 153E
This instrument measures surface profiles using a stylus that can detect changes in profile down to a few angstroms.
Surface Profilometer — Bruker DektakXT
The Bruker DektakXT Stylus Surface Profilometer is a high-resolution surface measurement system used to characterize film thickness, step height, surface roughness, and topography. It employs a contact stylus that scans across the sample surface to generate precise 2D and 3D surface profiles.
Key Features
- Stylus-based contact profilometry for high-precision measurements
- Vertical resolution in the nanometer range
- Capable of measuring step height, film thickness, and surface roughness
- Programmable scan length, speed, and stylus force
- 2D line scans and 3D surface mapping capabilities
- Automated stage with precise positioning control
- Data analysis software for profile extraction and reporting
How It Operates
- A diamond-tipped stylus is brought into contact with the sample surface
- The stylus scans laterally across the surface
- Vertical displacement of the stylus is recorded as a function of position
- The system converts displacement data into surface profiles
- Results are analyzed to determine thickness, roughness, and features
Typical Operation Workflow
- Mount sample on stage and secure in place
- Align stylus and set scan parameters (length, speed, force)
- Lower stylus onto sample surface
- Perform scan across region of interest
- Collect and visualize profile data
- Analyze step height, thickness, or roughness using software
- Save/export measurement results
System Functionality
- Thickness Measurement: Thin film thickness and step height analysis
- Surface Profiling: Line scans for topography characterization
- Roughness Analysis: Quantitative surface roughness metrics (Ra, RMS)
- 3D Mapping: Surface contour visualization (optional modes)
Training and Usage
Users are trained on:
- Sample mounting and alignment
- Stylus positioning and force control
- Scan parameter setup and optimization
- Data analysis and interpretation
- Safe handling of delicate stylus components
Safety Considerations
- Stylus tip is delicate — avoid excessive force or collision
- Ensure sample is securely mounted before scanning
- Avoid scanning over large debris or uneven surfaces
- Follow proper startup and shutdown procedures
- Handle system components with care to maintain calibration
Detailed Safety Considerations – Surface Profilometer (Bruker DektakXT)
The stylus profilometer involves hazards related to delicate mechanical components, contact-based measurement, sample integrity, and precision instrumentation. While it is a low-risk system compared to deposition tools, improper use can result in equipment damage, sample damage, and inaccurate measurements. Only trained and authorized users are permitted to operate the system.
Mechanical and Stylus Safety
- The system uses a diamond-tipped stylus that is extremely delicate and sensitive to force and collisions.
- Never apply excessive force to the stylus
- Avoid sudden movements or improper lowering of the stylus onto the sample
- Do not manually touch or attempt to adjust the stylus tip
- Ensure proper alignment before initiating a scan
- Immediately stop operation if abnormal resistance or vibration is observed
Sample Handling and Surface Integrity
- Improper samples can damage the stylus and compromise measurements.
- Ensure samples are clean, dry, and free of loose particles
- Avoid scanning over debris, dust, or sharp features
- Do not scan samples with large height variations beyond system limits
- Ensure sample surface is compatible with contact measurement
- Use caution with soft, sticky, or deformable materials
Stage and Movement Hazards
- The system includes a motorized precision stage.
- Keep hands clear during stage movement
- Ensure sample is securely mounted before scanning
- Verify scan path to avoid collisions with sample edges or fixtures
- Do not obstruct stage movement during operation
Force and Scan Parameter Safety
- Incorrect settings can damage both the stylus and the sample.
- Use appropriate stylus force for the material being measured
- Start with low force and increase only if necessary
- Set scan length and speed within safe limits
- Avoid aggressive scan settings on delicate or unknown samples
Instrument Protection and Calibration
- The profilometer is a high-precision metrology instrument requiring careful handling.
- Do not modify system settings beyond trained procedures
- Avoid impact, vibration, or sudden environmental changes
- Ensure system is calibrated before critical measurements
- Report any drift, noise, or abnormal readings
Contamination Control
- Contamination can affect both measurements and instrument performance.
- Use only clean, approved samples
- Avoid introducing oils, residues, or adhesive materials onto the stage
- Clean sample holders and stage after use if needed
- Prevent buildup of debris near stylus path
Electrical and System Safety
- Although low power, the system includes electrical components and control systems.
- Do not open system panels or access internal electronics
- Ensure proper power connection and grounding
- Report any electrical issues or system errors
PPE Requirements
- Lab garments (as required for the area)
- Safety glasses (recommended)
- Gloves when handling samples
Operational Safety Checks (Pre-Run)
- Sample is clean and securely mounted
- Stylus is properly aligned and undamaged
- Scan parameters (force, length, speed) are correctly set
- Stage area is clear of obstructions
- System is calibrated and ready
Post-Operation Safety
- Raise stylus safely after scan completion
- Remove sample carefully without contacting stylus
- Clean stage if necessary
- Save and back up data
- Log system usage and report issues
Waste Handling and Contamination Control
- Dispose of wipes and contaminated materials in designated containers
- Do not leave debris or residues on the stage
- Maintain cleanliness to ensure measurement accuracy
Emergency Procedures
- Stylus crash or damage → stop system immediately and notify staff
- Stage malfunction → halt operation and report
- Abnormal noise or vibration → stop and inspect
- Electrical issue → power down and notify staff
- Do not resume operation until the system has been inspected and cleared.
General Cleanroom Conduct
- Use only approved samples and measurement procedures
- Handle system components with care
- Avoid unnecessary adjustments or force
- Maintain cleanliness and precision environment
- Report any issues promptly
Profilometer Training – Session Coverage
During the training session, the following topics and steps will be covered:
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Overview of stylus profilometry principles (step height, thickness, roughness)
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System components (stylus, stage, control system, analysis software)
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Sample requirements (clean, flat, compatible with contact measurement)
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Sample mounting and alignment on stage
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Stylus positioning and safe approach to sample surface
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Setting scan parameters (length, speed, stylus force)
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Performing line scans and surface profiling
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Measuring film thickness and step height
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Surface roughness analysis (e.g., Ra, RMS)
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Data visualization and interpretation using software
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Saving and exporting measurement results
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Common issues (stylus damage, noise, inaccurate readings) and basic troubleshooting
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Safe stylus handling, system care, and calibration awareness
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Cleanup and system readiness for next user
Note: Training is conducted using standard samples, focusing on safe operation and accurate measurement techniques; users are responsible for carrying and advancing their own research projects.
