The SCIF cleanroom (Class 100 and Class 1000) provides state-of-the-art resources for nano- and micro-fabrication. A list of available equipment is provided below.
For each instrument, detailed manuals, operating instructions, safety guidelines, and relevant literature are available under the Instrument tab. Users are encouraged to review these materials carefully. While the short instructions and quick guides provide a helpful overview, consulting the full manual is strongly recommended for a deeper understanding, safe operation, and faster adaptation to the equipment.
For additional questions or specific instrument details, please contact: pkumar22@ucmerced.edu
Cleanroom Access and Relevant Policies
Fabrication/Deposition/Etching |
Characterization |
|
Cleanroom Tools |
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| Profilometer (Replaced with 3D Profilometer) | Semi-Automatic Ball/Wedge Wire bonder | ||||
| ebeam Evaporator | 3D Profilometer | Welding Head/ wire bonder | |||
| Focused Ion Beam (FIB) | Atomic Force Microscope (AFM) | Drying Oven | |||
| Sputtering | NUV Lightsource | ||||
| Atomic Layer Deposition (ALD) | Particle Counter System | ||||
| Plasma System (Glow Research) |
|
DI Water System | |||
| Microscope | |||||
| Hot Plates | |||||
| Sonicator | |||||
| Spin Coater | |||||
| Solvent Rinse Station | |||||
| Platform shaker |

