Model: Bruker Dektak XT
Location: SE1 153E
Sylus offered: 2 and 0.7 µm.
The Bruker DektakPRO Advanced Stylus Profilometer offers high-end surface metrology capabilities with precision, flexibility, and automation. Here's a summary of its key features:
System Highlights
- Model: DektakPRO Advanced System (DPRO-A)
- Repeatability: Industry-best 4 Ångström
- Software: Bruker Vision64 Operation and Analysis Software
- Processor: Dual parallel processors for speed and reliability
Measurement Capabilities
- 2D & 3D Profiling: Step height, roughness, and 3D surface mapping
- Stress Analysis:
- 2D film stress measurement (tensile/compressive)
- 3D radial stress mapping
- Automated Measurement: Collects line scans and 3D maps at multiple locations with pre-defined recipes
Hardware Features
- Motorized XY Stage: 150 × 150 mm travel, 360° rotation
- Scan Length: Up to 55 mm (optically flat scan block)
- Stylus Force: LIS 3 sensor, 1–15 mg standard, optional down to 0.03 mg (Nlite+) for delicate samples
- Camera: High-resolution digital color camera with adjustable magnification
- Stylus: Quick-change system (no re-calibration), includes:
- 2 µm radius starter stylus
- 0.7 µm stylus (green-coded for high-resolution/trench)
- Vacuum Chuck: Supports 2–3", 4–6", or 8" wafers
System & Software
- Computer: Bruker-supplied Dell desktop (Intel i5, 16 GB RAM, 512 GB SSD)
- Display: Flat-panel LCD monitor
- Software Modules:
- Stitching: Seamless scans over 6” travel
- 3D Mapping: Real-time and large-area topography
