eBeam Evaporator
Model: ATC-2036-E-T EVAPORATION SYSTEMS
Location: SE1 154 (Cleanroom Class 1000)
AJA International physical vapor deposition systems (6-pocket rotary e-beam source) offer exceptional value while delivering optimal performance and utilizing top-quality subcomponents. With this tool, we can deposit six different materials without breaking the vacuum.
Currently, we offer the following metals for all users:
Au, Pt, Cu, Ti, Cr, Ag, and Al.
A variety of materials/metals can be deposited with the ebeam.
