Sputtering
Model: VTC-1RF
Location: SE1 154 (cleanroom Class 1000)
(VTC-1RF) equipment to the cleanroom. VTC-1RF is a single head 1" RF Plasma magnetron sputtering system designed for non-metallic thin film coating, mainly for multilayer oxide thin films. It is capable of depositing metals like Pt, Cu, Au etc. At current we have 99.95% pure Pt target available for all users.
